| Boiling Point | 126°C |
| Color | Colorless |
| Formula Weight | 161.40 |
| Physical Form | Clear Liquid at 20°C |
| Chemical Name or Material | 1,1,1,3,3,3-Hexamethyldisilazane |
| UN Number | 3286 |
| 13838 |
Synonym:hexamethyldisilazane, bis trimethylsilyl amine, hmds, 1,1,1,3,3,3-hexamethyldisilazane, hexamethylsilazane, silanamine, 1,1,1-trimethyl-n-trimethylsilyl, tri-sil, 1,1,1-trimethyl-n-trimethylsilyl silanamine, hexamethyldisilizane, disilazane, 1,1,1,3,3,3-hexamethyl
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